MBE Ekipmanları ve Bileşenleri

Elektron Işın Buharlaştırıcıları:
Electron Beam Evaporator - EBV
Multi-pocket Evaporator - EBVM
Vertical Electron Beam Evaporator- EBVV

Alttaş Çeviriciler
Substrate Manipulator - SH
OxygenResistant Substrate Manipulator SH-O
Wafer Heater - WH

Ekipmanlar:
Power Supply and Temperature Control
Cables and Connectors
Manipulator Control Unit
Cryopump Valve Control Unit
Beam Flux Monit or
Cooling Shroud
Cross Beam Ioniser
Shutter Control Unit
Shutter
Soft-acting Rotary Shutter Module
Soft-acting Linear Shutter Module
Magnetic Rotary Feedthrough
Viewport Shutter
Crucibles
Refractory Metal Parts