Nanoteknoloji

  • 1 Litografi

    » Mask Alignment Sistemleri
    » Resist Processing Sistemleri
    » Lithography Track Sistemleri
    » Nanoimprint Litografi Sistemleri
    » Inspection Sistemleri
  • 2



    Metroloji

    » Mekanik Profiler

    » Optik Profiler
  • 3 Bonding

    » Wafer Bonding Sistemleri
    » Bond Alignment Sistemleri
    » Integrated Bonding Sistemleri
    » SOI Bonding Sistemleri
    » Temporary Bonding and Debonding Sistemleri
    » Inspection Sistemleri
  • 4



    Diamound Coating (HF-CVD)

    » Microwave Plasma CVD

    » Hot Filament CVD

Metroloji

• Mekanik Profiler
• Optik Profiler

Litografi

• Mask Alignment Sistemleri
• Resist Processing Sistemleri
• Lithography Track Sistemleri
• Nanoimprint Lithography Sistemleri(UV-NIL, µCP, HE)
• Inspection Sistemleri

Bonding

• Wafer Bonding Sistemleri
• Bond Alignment Sistemleri
• Integrated Bonding Sistemleri
• SOI Bonding Sistemleri
• Temporary Bonding and Debonding Sistemleri
•Inspection Sistemleri

Diamond Coating (HF CVD)

• Microwave Plasma CVD
• Hot Filament CVD